| 1주차 |
Course Introduction |
| 2주차 |
Fundamentals of Lithography (노광) |
| 3주차 |
Lithography Experiments I |
| 4주차 |
Lithography Experiments II |
| 5주차 |
Fundamentals of Semiconductor Analyzer (소자 측정) |
| 6주차 |
Semiconductor Analyzer Experiments I |
| 7주차 |
Semiconductor Analyzer Experiments II |
| 8주차 |
Fundamentals of Atomic Layer Deposition (ALD) |
| 9주차 |
Atomic Layer Deposition (ALD) Experiments I |
| 10주차 |
Atomic Layer Deposition (ALD) Experiments II |
| 11주차 |
Fundamentals of AFM (AFM measurement example 및 장비 설명) |
| 12주차 |
AFM Experiments I: Contact mode |
| 13주차 |
AFM Experiments II: Contact/Noncontact mode |
| 14주차 |
AFM Experiments III: Noncontact mode |
| 15주차 |
Final Exam (기말고사) |
| 16주차 |
|